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The super resolution lithography equipment project can process 22-nanometer chips through national acceptance – China Daily News




The super resolution lithography equipment project can process 22-nanometer chips through the national acceptance of the China Daily News Commercial Channel

China Daily, November 30 (Reporter Zhang Zhihao) On November 29, the main national scientific research equipment development project "Development of High Resolution Lithography Equipment" passed acceptance on the 29th. Lithography machines were developed by the Institute of Optoelectronic Technology from the Chinese Academy of Sciences, lithography. ..

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